# Multibeam Corporation

Startup profile on Capital Atlas: https://capitalatlas.ai/startups/multibeam

- Industry: Semiconductors
- Headquarters: Santa Clara, US
- Website: www.multibeamcorp.com
- Total disclosed funding: $31M
- Latest round: Series B (Jul 29, 2025)
- Investors on record: 4

## About

Multibeam Corporation, based in the US, focuses on developing high-productivity electron beam lithography solutions for semiconductor manufacturing, facilitating rapid prototyping and production for various advanced applications.Multibeam Corporation specializes in electron beam lithography solutions, founded in 2010 in Santa Clara, US. The company raised USD 31 mn in Series B funding in July 2025, led by Onto Innovation Inc. The founder's history and further details on prior ventures are not disclosed. Multibeam has completed one deal to date, engaging with key investors such as Lam Capital and MediaTek Ventures.Multibeam Corporation specializes in high-productivity electron beam lithography (EBL) solutions, prominently featuring its Multicolumn E-Beam Lithography (MEBL) platform. This technology enables rapid prototyping and production of advanced semiconductors for applications including advanced packaging, MEMS, and sensors. The MEBL system enhances manufacturing efficiency by eliminating traditional photomasks, streamlining production, and reducing time-to-market for semiconductor devices. The company serves a diverse client base, including leading device manufacturers and foundries across North America, Europe, and Asia, focusing on markets requiring advanced semiconductor technologies.Multibeam's revenue primarily comes from direct B2B transactions involving the sale and deployment of its advanced lithography systems. The company collaborates with semiconductor manufacturers, foundries, and research institutions through structured partnerships and sales agreements. Clients procure MEBL systems under negotiated contracts that may include installation, maintenance, and support services. Revenue is recognized upon delivery and setup of the systems, with opportunities for follow-up services and upgrades. Contracts for flagship products stipulate terms for equipment performance and service levels, providing value to clients in dynamic semiconductor markets.In July 2025, Multibeam Corporation raised USD 31 mn in Series B funding, led by Onto Innovation Inc., to expand the development of its multicolumn e-beam lithography platform. The funding will support initiatives in emerging semiconductor applications such as artificial intelligence, advanced packaging, and chip integration. The company aims to enhance its product offerings and expand into new markets, with specific targets for geographic growth and product launches to be detailed as developments progress.

## Funding rounds

- Series B, Jul 29, 2025, $31M — MediaTek Ventures, UMC Capital, Lam Capital, Onto Innovation Inc.

## Investors

- MediaTek Ventures (https://capitalatlas.ai/funds/mediatek-ventures) — Series B
- UMC Capital (https://capitalatlas.ai/funds/umc-capital) — Series B
- Lam Capital (https://capitalatlas.ai/funds/lam-capital) — Series B
- Onto Innovation Inc. — Series B