# ESOL

Startup profile on Capital Atlas: https://capitalatlas.ai/startups/esol

- Industry: Semiconductors
- Headquarters: Gyeonggi-do, South Korea
- Website: www.euvsol.com/
- Total disclosed funding: $54M
- Latest round: Series B (Jul 6, 2025)
- Investors on record: 8

## About

Based in Gyeonggi-do, South Korea, founded in 2018, ESOL operates as a semiconductor equipment-based company that has commercialized the EUV mass defect inspection facility. In 2025, ESOL raised KRW 74 billion in series B funding from new investors Emford Equity Partners, Korea Omega Investment Corp., KDB Bank, InterVest, Mirae Asset Venture Investment, Yuanta Investment, DSC Investment, and Quantum Ventures Korea. Other unspecified investors also participated in the round.  ESOL developed scanning reflection EUV microscope (SREM), which is a for gathering EUV actinic images during the EUV blank and EUV mask fabrication. The company offers Ephase, which is a mask phase measurement system monitoring EUV PSM for stable production, monitoring process error during PSM production, monitoring phase amount of EUV blank, and many more. In addition, the firm provides EUV pellicle transmission and reflectance measurement system and EUV micro-interference lithography equipment for semiconductors equipment industry.

## Funding rounds

- Series B, Jul 6, 2025, $54M — Korea Development Bank, InterVest, Yuanta Investment, DSC Investment, Mirae Asset Venture Investment, Korea Omega Investment Corp., Quantum Ventures Korea, Emford Equity Partners

## Investors

- Korea Development Bank (https://capitalatlas.ai/funds/korea-development-bank) — Series B
- InterVest (https://capitalatlas.ai/funds/intervest) — Series B
- Yuanta Investment (https://capitalatlas.ai/funds/yuanta-investment) — Series B
- DSC Investment (https://capitalatlas.ai/funds/dsc-investment) — Series B
- Mirae Asset Venture Investment (https://capitalatlas.ai/funds/mirae-asset-venture-investment) — Series B
- Korea Omega Investment Corp. (https://capitalatlas.ai/funds/korea-omega-investment-corp) — Series B
- Quantum Ventures Korea (https://capitalatlas.ai/funds/quantum-ventures-korea) — Series B
- Emford Equity Partners (https://capitalatlas.ai/funds/emford-equity-partners) — Series B