# Angstrom Excellence

Startup profile on Capital Atlas: https://capitalatlas.ai/startups/angstrom-excellence

- Industry: Semiconductors
- Headquarters: Shenzhen, China
- Website: www.angstrom-e.com
- Total disclosed funding: $148M
- Latest round: Series B (Jul 29, 2026)
- Investors on record: 23

## About

Based in Shenzhen, China and founded in 2020, Shenzhen Angstrom Excellence Technology Co. Ltd., trading as Angstrom Excellence, is a semiconductor company that focuses on the production and sales of semiconductor wafer fabrication front-end measurement equipment. It has an R&D and production base in Shenzhen and branch offices in Shanghai, Wuhan, Beijing, Hefei, and Chengdu. In December 2021, the company completed the construction of the clean rooms, covering more than 1,000 square meters. In July 2026, it raised approximately CNY 1 billion in a series B+ funding round.

Angstrom Excellence's main business is the research, development, production, and sales of measuring and testing equipment for the front-end of semiconductor wafers. Its products include optical integrated measurement equipment, optical diffraction lithography measurement equipment, and X-ray thin film measurement equipment. Products can be used for 3D NAND Memory wafer metrology and 7/5/3nm logic wafer metrology.

The company generates revenue from the sale of semiconductor wafer for optical and X-ray metrology products.

The company will use the latest funding to support the establishment of its large-scale manufacturing, delivery, service and support system, accelerate the breakthroughs in advanced processes, advanced packaging and high-end scientific research instruments, and promote deep synergy between capital, technology, industrial resources and application scenarios.

## Funding rounds

- Series B, Jul 29, 2026, $148M — Huagong Venture Capital, China Fortune-Tech Capital, China Reform Holdings, China Merchants Securities Zhiyuan Capital, Shenzhen Capital Real Estate Fund, CCB Private Equity Investment Management, Hefei High-tech Venture Capital, Kunpeng Capital, Beijing E-town international Industrial Investment Management, Changjiang Capital, GL Ventures, Suikai Equity Investment, Zhongxiaodan Venture Capital, Wuhan Optical Valley Financial Holding Group, Huawosi, Wuchuang Capital, Semi Fund
- Series B, Jul 17, 2026 — State Ventures Innovation Investment
- Series B, Feb 14, 2026 — China Fortune-Tech Capital, Shenzhen Capital Real Estate Fund, Changjiang Capital
- Series B, Jan 24, 2024 — GP Capital, ZJVC Venture Capital, CoStone Capital, China Merchants Zhiyuan Capital Investment, Shenzhen Capital Real Estate Fund, FutureX Capital, Changjiang Capital, Huawosi

## Investors

- GP Capital (https://capitalatlas.ai/funds/gp-capital) — Series B
- ZJVC Venture Capital (https://capitalatlas.ai/funds/zjvc-venture-capital) — Series B
- CoStone Capital (https://capitalatlas.ai/funds/costone-capital) — Series B
- China Merchants Zhiyuan Capital Investment — Series B
- Shenzhen Capital Real Estate Fund (https://capitalatlas.ai/funds/shenzhen-capital-real-estate-fund) — Series B
- FutureX Capital (https://capitalatlas.ai/funds/futurex-capital) — Series B
- Changjiang Capital (https://capitalatlas.ai/funds/changjiang-capital) — Series B
- Huawosi — Series B
- China Fortune-Tech Capital (https://capitalatlas.ai/funds/china-fortune-tech-capital) — Series B
- State Ventures Innovation Investment (https://capitalatlas.ai/funds/state-ventures-innovation-investment) — Series B
- Huagong Venture Capital (https://capitalatlas.ai/funds/huagong-venture-capital) — Series B
- China Reform Holdings (https://capitalatlas.ai/funds/china-reform-holdings) — Series B
- China Merchants Securities Zhiyuan Capital (https://capitalatlas.ai/funds/china-merchants-securities-zhiyuan-capital) — Series B
- CCB Private Equity Investment Management (https://capitalatlas.ai/funds/ccb-private-equity-investment-management) — Series B
- Hefei High-tech Venture Capital (https://capitalatlas.ai/funds/hefei-high-tech-venture-capital) — Series B
- Kunpeng Capital (https://capitalatlas.ai/funds/kunpeng-capital) — Series B
- Beijing E-town international Industrial Investment Management (https://capitalatlas.ai/funds/beijing-e-town-international-industrial-investment-managemen) — Series B
- GL Ventures (https://capitalatlas.ai/funds/gl-ventures) — Series B
- Suikai Equity Investment (https://capitalatlas.ai/funds/suikai-equity-investment) — Series B
- Zhongxiaodan Venture Capital (https://capitalatlas.ai/funds/zhongxiaodan-venture-capital) — Series B
- Wuhan Optical Valley Financial Holding Group — Series B
- Wuchuang Capital (https://capitalatlas.ai/funds/wuchuang-capital) — Series B
- Semi Fund — Series B